By Joel A. Kubby
No matter if you're a scholar taking an introductory MEMS direction or a practicing engineer who must wake up to hurry fast on MEMS layout, this useful consultant presents the hands-on event had to layout, fabricate and attempt MEMS units. you are going to how to use foundry multi-project fabrication approaches for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a variety of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and trying out MEMS units, to boot and workouts and layout demanding situations on the finish of each bankruptcy. options to the layout problem difficulties are supplied online
''Whether you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this sensible advisor offers the hands-on adventure had to layout, fabricate and try MEMS units. you are going to how you can use foundry multi-project fabrication strategies for inexpensive MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, to boot and workouts and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with ideas to the layout problem difficulties and a variety of case reports of MEMS devices''-- Read more... computing device generated contents notice: 1. creation; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and try out; eight. From prototype to product: MEMS deformable mirrors for adaptive optics
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Extra resources for A guide to hands-on MEMS design and prototyping
Html (last accessed on 3–17–2010). C. E. A. R. , The resonant gate transistor, IEEE Trans. Electron Devices 14, p. 117 (1967). W. J. Gabriel, MEMS: The systems function revolution, IEEE Trans. Electron Devices 14, pp. 25–31 (1999). T. S. Muller, Polycrystalline silicon micro-mechanical beams, Proc. Electrochemical Society Spring Meeting, Montreal, Quebec, Canada, May 9–14, pp. 184–185 (1982). M. T. S. Muller, Surface micromachining for microelectromechanical systems, Proc. IEEE 86(8), pp. 1552–1574 (1998).
J. M. G. R. W. E. W. Rogala, R. J. G. Darrin, Development, test and evaluation of MEMS micro-mirrors for free-space optical communications, Proc. SPIE 5550, pp. 299–312 (2004). 17 N. Doble, M. Helmbrecht, M. Hart, and T. Juneau, Advanced wavefront correction technology for the next generation of adaptive optics equipped ophthalmic instrumentation, Proc. SPIE 5688, pp. 125–132 (2005). 18 R. Wood, V. Dhuler, and E. Hill, A MEMS variable optical attenuator, Proc. IEEE/LEOS Int’l Conf. Opt. MEMS, Kauai, HI, Aug.
The mass is released from the substrate and is supported by springs. The released mass m reacts to an external force F according to Finertia ¼ ma ¼ m d2 x : dt2 ð2:29Þ If the mass is supported by springs with spring constant k, the springs supply an elastic restoring force: Felasticity ¼ Àkx: ð2:30Þ And if the mass moves through a viscous medium like air at a velocity v, there will be a viscous force: Fviscous ¼ Àcv ¼ Àc dx ; dt ð2:31Þ where c is the dampening coefficient for air. For our initial analysis we will consider a static acceleration so that there is no viscous force.
A guide to hands-on MEMS design and prototyping by Joel A. Kubby